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Automate semiconductor process control with software

Amfibian connects model development, Digital Twin validation and production operation in a single flow. It reduces process variability and automates the tuning and operating work engineers used to repeat by hand.

Stop rebuilding process control from scratch.

Amfibian comes with the capabilities you need for modeling, validation, deployment, and production operations. Configure it for your processes and equipment, validate in a Digital Twin, and start operating.

Custom-built approach
Define requirements→Develop→Integrate→Validate on site

Each change in process or equipment means repeating much of the same development and validation work.

Amfibian
Connect→Configure→Validate→Operate

Start with a ready-built product, then reuse proven methods for your next products and equipment.

Equipment keeps getting more capable. Process control is still tuned by hand.

Amfibian calculates the equipment conditions needed to reach the target process result.It combines zone conditions, process time and equipment parameters from the target wafer profile and process constraints, then validates the recipe before deployment.
Learn about Profile Control →

A model is only the beginning.

It has to keep running in production.

Build the process relationship and
control model.

Use process context and data to configure the models needed for VM, APC and Profile Control.

Validate before putting it on the line.

Check expected outcomes and constraints in a Digital Twin.

Run validated control in production.

Connect production data and apply control under the customer's approval rules.

Reuse the validated method

for the next product or tool.

Reuse process context, validation criteria and operating methods for the next product or tool.

Amfibian product view for process model configuration
Amfibian Digital Twin validation view
Amfibian production runtime view
Diagram showing how methods validated with Amfibian can be reused across different products, equipment, and processes for rapid scaling

After deployment, your engineers should be able to run it themselves.

“Do we have to call the vendor back every time we add a new tool or process?”

Customer engineers can use validated model structures and settings for new products, tools and processes.

“Can we diagnose and respond to problems ourselves?”

Engineers can review model state, key drivers and operating history to narrow down issues and respond on site.

“Where do our production data and models stay?”

Production data, models and operating settings can be managed in the customer's on-premises environment.

Reduce process variability and repetitive tuning together.

Results from prior production operation by the team

Semiconductor production operating experience

* Based on the team's prior semiconductor production operating experience.

+production models
+ yearscontinuous operation
%+variability improvement
control incidents

Built for manufacturing processes that need precise control.

Semiconductor Manufacturing

Manage variation across deposition, etch, CMP, thermal and other complex wafer processes.

Power & Compound Semiconductors

Control process outcomes and tool-to-tool and wafer-to-wafer variation across SiC, GaN and other material systems.

Photonics & MEMS

Predict and control uniformity across epitaxy, thin films, etch and microstructure processes.

Solar & Display

Manage film properties and spatial variation in large-area and high-throughput production.

Go deeper into process control.

Questions customers ask

before deployment.

Does AI change process conditions immediately?

Recommended values and expected outcomes are reviewed first, then applied through the customer's own approval process. The customer also decides the scope of automation.

Do we have to replace our MES, FDC or APC?

No. Existing manufacturing systems stay as they are. Amfibian connects the model development, validation and operation features you need to the data and operating environment you already have.

Do our data or models need to stay connected to an external service?

Amfibian can be deployed on-premises so production data, models and operating settings remain in the customer's environment.

Let's see how far your current process
can be automated.

We will review the operating method, equipment conditions, applicable control scope and validation approach.

Request a demo