Virtual Metrology
See the process result
before the measurement arrives
Virtual Metrology is an App that estimates process results, using process, equipment and upstream data, where measurement is missing or delayed. The estimate can also be used for state assessment and downstream Process Control.
Build prediction models that can stay useful in production
Process engineers define process context and data conditions and validate the model in Studio. Runtime then keeps track of model state and results.
Build from process context
Build the model using product, equipment and process conditions along with the available sensor and metrology data.
Validate metrology timing
and error characteristics
Check prediction accuracy along with the timing, data availability and error characteristics that matter in real operation.
Connect estimates
to decisions and control
Manage model state and estimated results in Runtime, and use them as feedback for Process Control when needed.